.....................지식/표면 검사

박막두께 측정기 비교 논문( 접촉식,비접촉식,Stylus, AFM,Optical)

행복해1 2010. 2. 10. 18:07

http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6V5B-3YB9SK0-8&_user=10&_coverDate=11%2F30%2F1995&_rdoc=1&_fmt=high&_orig=search&_sort=d&_docanchor=&view=c&_searchStrId=1201219506&_rerunOrigin=google&_acct=C000050221&_version=1&_urlVersion=0&_userid=10&md5=775e61d434e7a73d60d3220c03b4b2ee