표면 형상 측정기 (Profilometer) 분류

http://en.wikipedia.org/wiki/Profilometer 출처: 위키피디아

광학식 Optical methods^[1][2]

• Vertical scanning interferometry / White light interferometry
• Phase shifting interferometry
• Differential interference contrast microscopy (Nomarski microscopy)
• Focus detection methods
  • Intensity detection
  • Focus variation
  • Differential detection
  • Critical angle method
  • Astigmatic Method
  • Foucault method
  • Confocal microscopy
• Pattern projection methods
  • Fringe projection
  • Fourier profilometry
  • Moire

접촉식 Contact and pseudo-contact methods^[1][2]

• Stylus profilometer (mechanical profilometer)^[3]
• Atomic Force Microscopy
• Scanning Tunneling Microscopy