접촉식 (tactile measurement)[edit]
The following instruments are well established technologies. There are many manufacturers implementing these technologies into products:
- Profilometer - traditionally called a stylus and works like a phonograph
- Atomic force microscope
비접촉식 (optical microscopes)[edit]
Optical measurement instruments have some advantages over the tactile ones. The main advantages are:
- no touching of the surface (the sample can not be damaged)
- the measurement speed is much higher (up to a million 3d points can be measured in a second)
- they are designed primarily for 3D surface topography rather than single traces of data
- they can measure surfaces through transparent medium such as glass or plastic film
- they have lower vertical noise
Vertical scanning:
Horizonal scanning:
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