표면 형상(거칠기) 측정법

접촉식 (tactile measurement)[edit]

The following instruments are well established technologies. There are many manufacturers implementing these technologies into products:

• Profilometer - traditionally called a stylus and works like a phonograph
• Atomic force microscope

비접촉식 (optical microscopes)[edit]

Optical measurement instruments have some advantages over the tactile ones. The main advantages are:

• no touching of the surface (the sample can not be damaged)
• the measurement speed is much higher (up to a million 3d points can be measured in a second)
• they are designed primarily for 3D surface topography rather than single traces of data
• they can measure surfaces through transparent medium such as glass or plastic film
• they have lower vertical noise

Vertical scanning:

• Interferometry
• Confocal microscopy
• Focus variation
• Confocal chromatic aberration

Horizonal scanning:

• Scanning laser microscope (SLM)
• Structured light scanning
• 
  

출처:http://en.wikipedia.org/wiki/Surface_metrology