표면 분석 종류

1. 표면 결정 구조

- Elemental concentration --- AES, XPS, SIMS, ISS, TXRF

- 폭 분포도 Spatial distribution --- SAM, SIMS, XPS

- 깊이 분포도 Depth distribution --- AES, SIMS, RBS

2. Physics and Chemistry of Surface Species

- Electronic state --- XPS, UPS, EELS

- 분자 Molecular species --- SIMS, HREELS, LAMMA, SERS

- Energetics and Dynamics --- TPD, Atom Scattering

3. 표면 구조

- Arrangement of surface atoms --- LEED, RHEED, ISS, STM

- 표면 형상 Topography --- AFM, STM, SEM,surface profiler