EC1650/EC1750
EC1650/EC1750 furnish full of ingenuity for measuring with "high accuracy and quickly". EC1650 is economy, EC1750 is high precision type.
- High resolution
- 2CR normal type, 2CR phase correct and Gauss filter supplied
Mechanism / system | Porous static pressure air bearing system / table rotation type |
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Rotation accuracy | (0.04 + 0.0005H) μm H: height from table surface (mm) |
Max. measuring diameter | φ368 mm both inner and outer diameters |
Loading capacity | 20 kg |
Z traverse range | 300 mm (at the use of b-type stylus arm) * In case of EC 1650 |
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